Method for monitoring the flow of a gas into a vacuum reactor

Details Method for monitoring the flow of a gas into a vacuum reactor Method for monitoring the flow of a gas into a vacuum reactor

1997-06-24

2000-06-13

Pianalto, Bernard

Coating processes

Measuring, testing, or indicating

137551, 4272481, 42725523, 427569, 427582, 427585, C23C 1600

Patent

active

060746912

ABSTRACT:
A method for monitoring the actual flow of a gas into a vacuum facility, which flow of gas resulting from setting a desired flow of gas by means of at least one adjustable mass flow controller, interconnected between said facility and a pressurized reservoir arrangement for said gas.

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