Image analysis – Histogram processing – For setting a threshold
Patent
1992-05-11
1992-12-15
Boudreau, Leo H.
Image analysis
Histogram processing
For setting a threshold
358106, 356237, 382 55, G06K 900
Patent
active
051724200
ABSTRACT:
Inspection of a metallized pattern (14) on a substrate (12) to monitor both the lateral dimensions and the intensity variation beyond tolerance limits is carried out by first capturing the image of the pattern with a television camera (20). The captured image is then compared to each of two models (40 and 42) comprising comparison patterns whose features have their lateral dimensions eroded and dilated, respectively, and the other aspect dilated and eroded, respectively, by a factor corresponding to the dimensional and intensity tolerances. The results of such comparison are logically combined to yield an image containing only defects (if any).
REFERENCES:
patent: 4644585 (1987-02-01), Crimmins et al.
patent: 4692943 (1987-09-01), Pietzch et al.
patent: 4928313 (1990-05-01), Leonard et al.
patent: 4975972 (1990-12-01), Bose et al.
patent: 5046113 (1991-09-01), Hoki
A. J. Blodgett, "Microelectronic Packaging," Scientific American, vol. 247, pp. 86-96, Jul. 1983.
G. Dishon and O. Hecht, "Application of Automatic Optical Inspection (AOI) in the Manufacturing Technology of Thin Film Multichip Module (MCM)," Proc. NEPCON West, 12 pages, 1990.
Ray Rajarshi
Riese David R.
AT&T Bell Laboratories
Boudreau Leo H.
Foy David
Levy R. B.
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