Method for monitoring production of pixel detectors and...

Details Method for monitoring production of pixel detectors and... Method for monitoring production of pixel detectors and...

2006-01-03

2006-01-03

Nguyen, Ha (Department: 2812)

Semiconductor device manufacturing: process

With measuring or testing

C438S018000

Reexamination Certificate

active

06982176

ABSTRACT:
A method for monitoring the quality of a manufacturing process for making detector panels that have a plurality of pixels in a two-dimensional array includes, in each detector panel, manufacturing a set of baseline pixels and a set of test pixels. Each test pixel has an electrical component having a geometric dimension varied by an amount sufficient to introduce a measurable variation in a test that measures parameters of pixels that are dependent upon the varied dimension. The method further includes performing the test on the set of baseline pixels and the set of varied pixels, analyzing the results of the test, and adjusting parameters of the manufacturing process in accordance with the analysis.

REFERENCES:
patent: 5233181 (1993-08-01), Kwansnick et al.
patent: 5587591 (1996-12-01), Kingsley et al.
patent: 5648654 (1997-07-01), Possin
patent: 5777355 (1998-07-01), Possin et al.
patent: 6465824 (2002-10-01), Kwansnick et al.
patent: 2003/0189175 (2003-10-01), Lee et al.
patent: 1 179 852 (2002-02-01), None
patent: 1 179 852 (2002-02-01), None

Affiliated with

Also associated with

Rating

Method for monitoring production of pixel detectors and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for monitoring production of pixel detectors and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for monitoring production of pixel detectors and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3592670