Method for monitoring micro-lens curvature in-line

Details Method for monitoring micro-lens curvature in-line Method for monitoring micro-lens curvature in-line

2008-01-01

2008-01-01

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

Lens or reflective image former testing

C359S642000, C359S648000

Reexamination Certificate

active

11216270

ABSTRACT:
A method and system for monitoring a curvature of a micro-lens in-line is disclosed. According to embodiments, sizes of circles (or circle images) from a top view of a micro-lens are measured and correlated to a change in focus depth of an optical scope. A method in accordance with embodiments can include the steps of: (i) measuring a diameter or area of a circle in the micro-lens when focusing a scope on a top point of the micro-lens; (ii) measuring a diameter or area of one or more second circles in the micro-lens by focusing the scope on one or more points lower than the top point of the micro-lens in stages, each stage correlated to changing a depth of focus of the scope; and (iii) calculating the curvature of the micro-lens with each diameter or area of the measured circles.

REFERENCES:
patent: 4439025 (1984-03-01), Smirmaul
patent: 6762846 (2004-07-01), Poris
patent: 2005/0046956 (2005-03-01), Gruhlke
patent: 2007/0002334 (2007-01-01), Altman et al.

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