Electricity: measuring and testing – Magnetic – With means to create magnetic field to test material
Patent
1982-05-17
1985-12-03
Strecker, Gerard R.
Electricity: measuring and testing
Magnetic
With means to create magnetic field to test material
427 10, G01B 710, G01R 3312
Patent
active
045568456
ABSTRACT:
A conductive film deposition rate monitoring method for measuring the real time deposition rate of a metallic deposition process particularly an electroless plating bath, including the steps of positioning an eddy current detector within a predetermined distance of a test surface where the deposition is to be deposited, and the step of monitoring the output of the detector. The apparatus comprises an eddy current sensor and a non-metallic housing for the sensor, having a non-conductive wall of predetermined thickness between the sensor and the surface of the wall distant from the sensor, the distant wall being immersed in the deposition environment, such as a plating bath, so that a deposit takes place on the distant surface, and measuring means connected to the output of the sensor for measuring the amplitude and rate of change of the output of the sensor.
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patent: 3358225 (1967-12-01), Peugot
patent: 3773548 (1973-11-01), Baker et al.
patent: 3775277 (1973-11-01), Pompei et al.
Canestaro, "Continuous Monitoring of Plating Bath Plating Rate", IBM Tech. Disclosure Bul. vol. 17, No. 6, pp. 1581-1582, 11/1974.
Strope Douglas H.
Wray Thomas E.
Galbi Elmer W.
International Business Machines - Corporation
Jancin, Jr. J.
Smith Marilyn D.
Snow Walter E.
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