Method for monitoring alignment using a modified retroreflector

Details Method for monitoring alignment using a modified retroreflector Method for monitoring alignment using a modified retroreflector

1990-07-25

1992-01-28

Turner, Samuel A.

Optics: measuring and testing

By polarized light examination

With birefringent element

G01B 902

Patent

active

050838660

ABSTRACT:
A method for monitoring an alignment of a workpiece with respect to a reference. The method includes a step of attaching to the workpiece a novel optical device comprising a modified corner cube retroreflector. The novel optical device can function such that a specified percentage of incident radiation reflects in accordance with Snell's Law, with a residual reflected beam reflecting retroreflectively. The method further includes a step of directing a radiation beam to the optical device, for generating an interference pattern induced by the Snell's Law and retroreflective beams. The interference pattern provides a measure of the alignment of the workpiece.

REFERENCES:
patent: 1840790 (1932-01-01), Oestnaes et al.
patent: 4097141 (1978-06-01), Warner
patent: 4761055 (1988-08-01), Hatje
patent: 4929082 (1990-05-01), Webber

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