Method for molding high precision components

Details Method for molding high precision components Method for molding high precision components

1998-06-04

2000-10-24

Silbaugh, Jan H.

Plastic and nonmetallic article shaping or treating: processes

With severing, removing material from preform mechanically,...

Surface finishing

264 81, 264 82, 264219, 264221, 264317, 264341, 216 2, 216 39, 216 47, 216 52, 216 99, B29C 4108, B29C 3352, C25F 302, C23F 102, C23F 104

Patent

active

061362433

ABSTRACT:
A method for molding high precision components is provided that allows inexpensive, rapid fabrication of components using a process involving a silicon substrate, in which the mold pattern is created using multiple mask layers, a deep reactive ion etch process and photolithographic patterning techniques.

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