Method for modulating shapes of substrates

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C355S073000, C355S075000, C438S692000

Reexamination Certificate

active

06980282

ABSTRACT:
The present invention is directed to a method for modulating shapes of a substrate, having first and second opposed surfaces. This is achieved by creating a pressure differential between differing regions of the first opposed surface to attenuate structural distortions in the second opposed surface that results from external forces bearing on the substrate.

REFERENCES:
patent: 3783520 (1974-01-01), King
patent: 4070116 (1978-01-01), Frosch et al.
patent: 4119688 (1978-10-01), Hiraoka
patent: 4201800 (1980-05-01), Alcorn et al.
patent: 4426247 (1984-01-01), Tamamura et al.
patent: 4507331 (1985-03-01), Hiraoka
patent: 4552833 (1985-11-01), Ito et al.
patent: 4600309 (1986-07-01), Fay
patent: 4657845 (1987-04-01), Frechet et al.
patent: 4692205 (1987-09-01), Sachdev et al.
patent: 4707218 (1987-11-01), Giammarco et al.
patent: 4724222 (1988-02-01), Feldman
patent: 4731155 (1988-03-01), Napoli et al.
patent: 4737425 (1988-04-01), Lin et al.
patent: 4808511 (1989-02-01), Holmes
patent: 4826943 (1989-05-01), Ito et al.
patent: 4848911 (1989-07-01), Uchida et al.
patent: 4857477 (1989-08-01), Kanamori
patent: 4891303 (1990-01-01), Garza et al.
patent: 4908298 (1990-03-01), Hefferon et al.
patent: 4919748 (1990-04-01), Bredbenner et al.
patent: 4921778 (1990-05-01), Thackeray et al.
patent: 4931351 (1990-06-01), McColgin et al.
patent: 4964945 (1990-10-01), Calhoun
patent: 4976818 (1990-12-01), Hashimoto et al.
patent: 4980316 (1990-12-01), Huebner
patent: 4999280 (1991-03-01), Hiraoka
patent: 5053318 (1991-10-01), Gulla et al.
patent: 5071694 (1991-12-01), Uekita et al.
patent: 5074667 (1991-12-01), Miyatake
patent: 5108875 (1992-04-01), Thackeray et al.
patent: 5148036 (1992-09-01), Matsugu et al.
patent: 5148037 (1992-09-01), Suda et al.
patent: 5151754 (1992-09-01), Ishibashi et al.
patent: 5169494 (1992-12-01), Hashimoto et al.
patent: 5173393 (1992-12-01), Sezi et al.
patent: 5179863 (1993-01-01), Uchida et al.
patent: 5198326 (1993-03-01), Hashimoto et al.
patent: 5212147 (1993-05-01), Sheats
patent: 5234793 (1993-08-01), Sebald et al.
patent: 5240878 (1993-08-01), Fitzsimmons et al.
patent: 5242711 (1993-09-01), DeNatale et al.
patent: 5244818 (1993-09-01), Jokerst et al.
patent: 5314772 (1994-05-01), Kozicki et al.
patent: 5318870 (1994-06-01), Hartney
patent: 5324683 (1994-06-01), Fitch et al.
patent: 5328810 (1994-07-01), Lowrey et al.
patent: 5330881 (1994-07-01), Sidman et al.
patent: 5362606 (1994-11-01), Hartney et al.
patent: 5366851 (1994-11-01), Novembre
patent: 5374454 (1994-12-01), Bickford et al.
patent: 5376810 (1994-12-01), Hoenk et al.
patent: 5380474 (1995-01-01), Rye et al.
patent: 5417802 (1995-05-01), Obeng
patent: 5421981 (1995-06-01), Leader et al.
patent: 5422295 (1995-06-01), Choi et al.
patent: 5424549 (1995-06-01), Feldman
patent: 5425848 (1995-06-01), Haisma et al.
patent: 5431777 (1995-07-01), Austin et al.
patent: 5439766 (1995-08-01), Day et al.
patent: 5453157 (1995-09-01), Jeng
patent: 5458520 (1995-10-01), DeMercurio et al.
patent: 5468542 (1995-11-01), Crouch
patent: 5515167 (1996-05-01), Ledger et al.
patent: 5527662 (1996-06-01), Hashimoto et al.
patent: 5563684 (1996-10-01), Stagaman
patent: 5654238 (1997-08-01), Cronin et al.
patent: 5669303 (1997-09-01), Maracas et al.
patent: 5670415 (1997-09-01), Rust
patent: 5700626 (1997-12-01), Lee et al.
patent: 5736424 (1998-04-01), Prybyla et al.
patent: 5737064 (1998-04-01), Inoue et al.
patent: 5743998 (1998-04-01), Park
patent: 5772905 (1998-06-01), Chou
patent: 5855686 (1999-01-01), Rust
patent: 5895263 (1999-04-01), Carter et al.
patent: 5900160 (1999-05-01), Whitesides et al.
patent: 5907782 (1999-05-01), Wu
patent: 5926690 (1999-07-01), Toprac et al.
patent: 5948219 (1999-09-01), Rohner
patent: 5948470 (1999-09-01), Harrison et al.
patent: 5948570 (1999-09-01), Kornblit et al.
patent: 6019166 (2000-02-01), Viswanath et al.
patent: 6033977 (2000-03-01), Gutsche et al.
patent: 6035805 (2000-03-01), Rust
patent: 6039897 (2000-03-01), Lochhead et al.
patent: 6096655 (2000-08-01), Lee et al.
patent: 6137562 (2000-10-01), Masuyuki et al.
patent: 6150231 (2000-11-01), Muller et al.
patent: 6150680 (2000-11-01), Eastman et al.
patent: 6245581 (2001-06-01), Bonser et al.
patent: 6274294 (2001-08-01), Hines
patent: 6309580 (2001-10-01), Chou
patent: 6326627 (2001-12-01), Putvinski et al.
patent: 6329256 (2001-12-01), Ibok
patent: 6334960 (2002-01-01), Willson et al.
patent: 6383928 (2002-05-01), Eissa
patent: 6387783 (2002-05-01), Furukawa et al.
patent: 6388253 (2002-05-01), Su
patent: 6391798 (2002-05-01), DeFelice et al.
patent: 6455411 (2002-09-01), Jiang et al.
patent: 6482742 (2002-11-01), Chou
patent: 6489068 (2002-12-01), Kye
patent: 6514672 (2003-02-01), Young et al.
patent: 6518168 (2003-02-01), Clem et al.
patent: 6534418 (2003-03-01), Plat et al.
patent: 6541360 (2003-04-01), Plat et al.
patent: 6561706 (2003-05-01), Singh et al.
patent: 6565928 (2003-05-01), Sakamoto et al.
patent: 6632742 (2003-10-01), Yang et al.
patent: 6635581 (2003-10-01), Wong
patent: 6646662 (2003-11-01), Nebashi et al.
patent: 6677252 (2004-01-01), Marsh
patent: 6696220 (2004-02-01), Bailey et al.
patent: 6703190 (2004-03-01), Elian et al.
patent: 6716767 (2004-04-01), Shih et al.
patent: 6730256 (2004-05-01), Bloomstein et al.
patent: 6737202 (2004-05-01), Gehoski et al.
patent: 6743713 (2004-06-01), Mukherjee-Roy et al.
patent: 6767983 (2004-07-01), Fujiyama et al.
patent: 6770852 (2004-08-01), Steger
patent: 6776094 (2004-08-01), Whitesides et al.
patent: 6777170 (2004-08-01), Bloomstein et al.
patent: 2002/0093122 (2002-07-01), Choi et al.
patent: 2002/0094496 (2002-07-01), Choi et al.
patent: 2002/0098426 (2002-07-01), Sreenivasan et al.
patent: 2002/0132482 (2002-09-01), Chou
patent: 2002/0167117 (2002-11-01), Chou
patent: 2003/0080471 (2003-05-01), Chou
patent: 2003/0081193 (2003-05-01), White et al.
patent: 2003/0092261 (2003-05-01), Kondo et al.
patent: 2003/0113638 (2003-06-01), Mancini et al.
patent: 2003/0129542 (2003-07-01), Shih et al.
patent: 2003/0179354 (2003-09-01), Araki et al.
patent: 2004/0029041 (2004-02-01), Shih et al.
patent: 2004/0036201 (2004-02-01), Chou et al.
patent: 28004786 (1978-07-01), None
patent: 55-88332 (1978-12-01), None
patent: 57-7931 (1980-06-01), None
patent: 63-138730 (1986-12-01), None
patent: 1-196749 (1989-08-01), None
patent: 02-24848 (1990-01-01), None
patent: 02-92603 (1990-04-01), None
patent: WO 00/21689 (2000-04-01), None
patent: WO 01/47003 (2001-06-01), None
patent: WO 01/69317 (2001-09-01), None
patent: WO 01/79592 (2001-10-01), None
patent: WO 01/79933 (2001-10-01), None
patent: WO 01/90816 (2001-11-01), None
Krauss et al., “Fabrication of Nanodevices Using Sub-25nm Imprint Lithography,” Appl. Phys. Lett 67(21), 3114-3116, 1995.
Chou et al., “Imprint of Sub-25 nm Vias and Trenches in Polymers,” Applied Physics Letters, Nov. 20, 1995, pp. 3114-3116, vol. 67(21).
Chou et al., “Imprint Lithography with 25-Nanometer Resolution,” Science, Apr. 5, 1996, pp. 85-87, vol. 272.
Haisma et al., “Mold-Assisted Nanolithography: A Process for Reliable Pattern Replication,” Journal of Vacuum Science and Technology, Nov./Dec. 1996, pp. 4124-4128, vol. B 14(6).
Chou et al., “Imprint Lithography with Sub-10nm Feature Size and High Throughput,” Microelectronic Engineering, 1997, pp. 237-240, vol. 35.
Mittal et al., “Precision Motion Control of Magnetic Suspension Acutator Using a Robust Nonlinear Compensation Scheme,” IEEE/ASME Transactions on Mechatronics, Dec. 1997, pp. 268-280, vol. 2, No. 4.
Lee et al., “An Ultraprecision Stage for Alignment of Wafers in Advanced Microlithography,” Precision Engineering, 1997, pp. 113-122, vol. 21, Elsevier Science Inc., 655 Avenue of the Americas, NY, NY 10010.
Koseki et al., “Design and Accuracy Evaluation of High-Speed and High-Precision Parallel Mechanism,” Proc. of the 1998 IEEE, Intl. Conf. on Robotics & Automation, May 1998, pp. 1340-1345, Leuven, Belgium.
Kim et al., “High Precision Magnetic Levitation Stage

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method for modulating shapes of substrates does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for modulating shapes of substrates, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for modulating shapes of substrates will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3483915

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.