Data processing: structural design – modeling – simulation – and em – Modeling by mathematical expression
Reexamination Certificate
2007-03-27
2007-03-27
Ferris, Fred (Department: 2128)
Data processing: structural design, modeling, simulation, and em
Modeling by mathematical expression
C716S030000
Reexamination Certificate
active
10059176
ABSTRACT:
A method for using a computer to calculate a pileup state of an impurity in an interface between an Si layer in which a source and a drain are formed, and an SiO2layer brought in contact with the Si layer at a high speed, wherein data is first set assuming that the Si layer is constituted of a plurality of cells. Subsequently, the impurity is moved to a pileup position of the interface from each cell, and an amount of impurity piled up in each pileup position of the interface is calculated. In this case, a mass of the impurity moving to the interface from each cell is determined as a function of a distance to each pileup position from each cell, and a distance to a source or a drain closest to the cell.
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Ferris Fred
Oki Electric Industry Co. Ltd.
Saxena Akash
Volentine & Whitt P.L.L.C.
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