Abrading – Abrading process – Glass or stone abrading
Patent
1997-01-06
1998-03-17
Eley, Timothy V.
Abrading
Abrading process
Glass or stone abrading
451 57, 451 65, 451221, 451254, B24B 100, B24B 724, B24B 914
Patent
active
057279900
ABSTRACT:
A method and an apparatus, which enable mirror-polishing a peripheral chamfered portion of a semiconductor wafer effectively, are disclosed. Mirror-polishing a peripheral side surface of the chamfered portion of the wafer, beveled surfaces thereof, and rounded edges formed between the peripheral side surface and each of the beveled surfaces, are individually carried out.
REFERENCES:
patent: 4286415 (1981-09-01), Loreto
patent: 4344260 (1982-08-01), Ogiwara
patent: 4793101 (1988-12-01), Dlouhy et al.
patent: 5295331 (1994-03-01), Honda et al.
Hasegawa Fumihiko
Ichikawa Koichiro
Inada Yasuo
Kuroda Yasuyoshi
Ohtani Tatsuo
Eley Timothy V.
Fujikoshi Machinery Corp.
Shin-Etsu Handotai & Co., Ltd.
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