Method for milling a transmission electron microscope test slice

Details Method for milling a transmission electron microscope test slice Method for milling a transmission electron microscope test slice

1998-08-17

2000-06-27

Nguyen, Kiet T.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250309, H01J 3726

Patent

active

060809914

ABSTRACT:
A focused ion beam (FIB) is used to mill a test slice to form an observable wall for a transmission electron microscope (TEM). A slanting angle .theta. of the observable wall surface is automatically formed. The method for milling the test slice includes the following steps: The first step is to measure the slanting angle .theta.. The next step is to tilt the test slice with the slanting angle .theta. in both a counterclockwise direction and a clockwise direction and to perform FIB milling so that the TEM observable wall has a uniform thickness. Furthermore, during the FIB milling, an aperture in the TEM observable wall serves as a milling stop signal.

REFERENCES:
patent: 5525806 (1996-06-01), Iwasaki et al.
patent: 5656811 (1997-08-01), Itoh et al.
patent: 5770861 (1998-06-01), Hirose et al.

Affiliated with

Also associated with

Rating

Method for milling a transmission electron microscope test slice does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for milling a transmission electron microscope test slice, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for milling a transmission electron microscope test slice will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1786492