Method for microfabricating diamond

Details Method for microfabricating diamond Method for microfabricating diamond

1998-05-29

1999-03-30

Niebling, John F.

Semiconductor device manufacturing: process

Having diamond semiconductor component

438142, 438150, H01L 2100, H01L 21335, H01L 2184

Patent

active

058888462

ABSTRACT:
A method for microfabricating diamond includes the steps of: forming a resist layer composed of a ladder silicone spin-on glass material on the surface of diamond; performing lithography, in which the resist layer is irradiated with an electron beam or an ion beam in a given pattern; developing the resist layer to form the given pattern; and etching diamond by an ECR plasma etching method or a high-frequency plasma etching method.

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