Method for microfabricating a probe with integrated handle,...

Details Method for microfabricating a probe with integrated handle,... Method for microfabricating a probe with integrated handle,...

2008-12-11

2010-12-28

Berman, Jack I (Department: 2881)

Scanning-probe techniques or apparatus; applications of scanning

Particular type of scanning probe microscopy or microscope;...

Atomic force microscopy or apparatus therefor, e.g., afm probes

C850S040000, C850S053000, C977S863000, C977S873000

Reexamination Certificate

active

07861315

ABSTRACT:
A simple method for integrating a circuit onto a probe with a handle, a cantilever and a tip is provided. By fabricating a probe whose surface has recessed patterns of the desirable profile, a circuit can be formed on one part of the handle out over the cantilever and back onto a different part of the handle without employing a circuit lithography step. The circuit material constituting the circuit is deposited orthogonally to the probe surface with a line-of-sight technique.

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patent: 2008/0216583 (2008-09-01), Bargatin et al.
patent: 2009/0038404 (2009-02-01), Tang et al.

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