Method for measuring volatile hydrides

Details Method for measuring volatile hydrides Method for measuring volatile hydrides

1981-11-18

1984-05-08

Marcus, Michael S.

Chemistry: analytical and immunological testing

Silicon containing

422 91, 436103, 436164, 436182, G01N 2100

Patent

active

044475438

ABSTRACT:
According to the present invention volatile hydrides such as diborane, arsine, phosphine and the like are made to react with mercuric oxide at room temperature to produced mercury atom, the concentration of which is thereafter measured and the concentration of volatile hydrides is determined in accordance with the corresponding measured mercury atom concentration. As the measuring apparatus according to the present invention is made to measure mercury atom, it can easily detect even extremely small quantity of substances such as volatile hydrides and respond quickly, thus enabling the apparatus to be suitably used as a monitor in semiconductor industry.

REFERENCES:
patent: 2648598 (1953-08-01), Stitt et al.
patent: 3844719 (1974-10-01), Hammitt
patent: 4181699 (1980-01-01), Kitzinger
patent: 4271125 (1981-06-01), Leichnitz
Anderson, Reactions of Triethyltin Hydride with Inorganic Halides and Oxides; J.A.C.S. 9-20-57; pp. 4913-4915 , vol. 79.
Det. Tube Handbook 4th Ed., 1979, Leichnitz.

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