Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Patent
1993-03-05
1994-04-12
Fields, Carolyn E.
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
250332, 250349, G01N 2188
Patent
active
053028309
ABSTRACT:
A method for measuring thermal differences in infrared emissions from semiconductors, the method utilizing an image sensor including an array detector having a plurality of detector elements which produce signals corresponding to semiconductor radiation emission focused thereupon by an optical lens system. At least one bandpass filter is utilized to substantially filter that portion of the semiconductor radiation emission having wavelengths greater than 5 micrometers. The detector element signals are processed to identify performance degrading phenomena occurring in the semiconductor device.
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Fields Carolyn E.
General Research Corporation
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