Data processing: measuring – calibrating – or testing – Measurement system – Orientation or position
Reexamination Certificate
2011-03-22
2011-03-22
Feliciano, Eliseo Ramos (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Orientation or position
C702S155000, C382S199000
Reexamination Certificate
active
07912671
ABSTRACT:
The present invention relates to a method for determining the coordinates of an arbitrarily shaped pattern in a deflector system. The method basically comprises the steps of: moving the pattern in a first direction (X), calculating the position of the edge of the pattern by counting the number of micro sweeps, performed in a perpendicular direction (Y), until the edge is detected, and determining the coordinates by relating the number of counted micro sweeps to the speed of the movement of the pattern. The invention also relates to software implementing the method.
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Ekberg Peter
Stiblert Lars
Beffel, Jr. Ernest J.
Feliciano Eliseo Ramos
Haynes Beffel & Wolfeld LLP
Micronic Laser Systems AB
Suglo Janet L
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