Method for measuring the microrelief of an object and...

Details Method for measuring the microrelief of an object and... Method for measuring the microrelief of an object and...

2007-05-22

2007-05-22

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

Having polarization

C356S512000

Reexamination Certificate

active

10466351

ABSTRACT:
Method of optical measuring the microrelief of an object using a modulation interference microscope. An input coherent monochromatic polarized light flux is split into an object light beam exposing the object and a reference beam. The light flux intensity is redistributed between the object and reference beams. Thereafter, polarization modulation is performed separately for the object beam and the reference beam. The polarized object beam is reflected onto the object plane to expose the object field. Amplitude modulation is performed by changing the intensity ratio between the object beam and the reference beam. A fraction of the light at a pixel caused by the object beam with respect to the total light falling on the pixel is determined.

REFERENCES:
patent: 4869593 (1989-09-01), Biegen
patent: 6721094 (2004-04-01), Sinclair et al.
patent: 2029976 (1995-02-01), None
Phase-mpa measurements by interferometry with sinusoidal phase modulation and four integrating buckets, Dubois, Journal of the Optical Society of America, Aug. 2001, pp. 1972-1979.
Modulation Interference Microscope, Osipov, SPIE, vol. 5067, 2003, pp. 227-233.

Affiliated with

Also associated with

Rating

Method for measuring the microrelief of an object and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for measuring the microrelief of an object and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for measuring the microrelief of an object and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3774489