Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Patent
1996-06-25
1998-03-03
Nguyen, Vinh P.
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Lumped type parameters
324715, 324724, 324756, 250306, G01R 3126, H01J 3726
Patent
active
057239819
ABSTRACT:
Measuring an electrical potential in a semiconductor element by applying one or more voltages over the semiconductor element, placing one or more conductors in contact with the semi-conductor element using a scanning proximity microscope, calibrating the contact force between the conductors and the semiconductor element and measuring an electrical potential in the semi-conductor element with at least one of the conductors while injecting a substantially zero current in the semiconductor element. To measure the electrical potential distribution within the semiconductor, the position of at least one of the conductors is changed and the electric potential re-measured.
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de Wolf Peter
Hellemans Louis C.
Trenkler Thomas
Vandervorst Wilfried
Do Diep
IMEC vzw
Nguyen Vinh P.
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