Method for measuring the depositions, densification of etching r

Details Method for measuring the depositions, densification of etching r Method for measuring the depositions, densification of etching r

1997-02-25

1998-05-05

Beck, Shrive

Coating processes

Measuring, testing, or indicating

427 10, 427226, 427228, 427249, 427543, 427590, 427591, 427595, C23C 1626

Patent

active

057470960

ABSTRACT:
A method for determining the instantaneous and cumulative mass rate of change of a conductive body in a deposition, densification or etching process through the use of a gaseous, liquid or particulate solids precursor. In one application, porous solid structures are densified by thermally decomposing a gaseous precursor to deposit an electrically and thermally conductive deposit within the structure. The rate of densification is determined by measuring the change of the electrical conductivity of the structure over time as the structure increases in mass.

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