Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-01-26
2010-12-14
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07852489
ABSTRACT:
A reference plane is arranged in a posture obliquely tilted at an optional angle relative to a traveling direction of a light-beam, so that an interference fringe is generated from the reflected light-beams which are reflected from a target plane and the reference plane and, then, return on a single optical path. An image of the interference fringe is taken by a CCD camera to acquire intensity value data of each pixel. A phase of an interference fringe waveform is obtained for each pixel by a CPU by fitting the intensity value data to a model equation expressing the interference fringe waveform, where the intensity value data contain that of each pixel and those of the pixels in the vicinity of the relevant pixel, on assumption that DC components, AC amplitudes and phases of the interference fringe waveforms are respectively constant in the vicinity of the relevant pixel. The obtained phase is converted into a height to measure a surface profile.
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Kato, Jun-ichi, “Real-Time Fringe Analysis for Interferometry and Its Applications”, Journal of the Japan Society of Precision Engineering, 1998, vol. 64, No. 9, pp. 1289-1293.
Kitagawa Katsuichi
Ogawa Hidemitsu
Sugiyama Masashi
Suzuki Kazuyoshi
Cheng Law Group PLLC
Chowdhury Tarifur
Hansen Jonathan M
Tokyo Institute of Technology
Toray Engineering Co., Ltd.
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