Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2005-09-20
2005-09-20
Karlsen, Ernest (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S754120, C324S757020
Reexamination Certificate
active
06946864
ABSTRACT:
A measuring arrangement for measuring product parameters of a component in the epitaxial layer (28) of a wafer comprises measuring probe (3) on whose contact side (23) a recess (24) is installed, into which an electrolyte can be poured. The electrolyte produces an electrical connection between a contact body (11), which is charged with a signal from a pulsed-current source, and the surface (22) of the wafer (2). A detector (16) serves for detecting the light which is emitted by the component.
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Gramann Wolfgang
Oberschmid Raimund
Späth Werner
Teich Wolfgang
Greenberg Laurence A.
Karlsen Ernest
Locher Ralph E.
Osram GmbH
Stemer Werner H.
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