Method for measuring piezoelectric constant of thin film shaped

Details Method for measuring piezoelectric constant of thin film shaped Method for measuring piezoelectric constant of thin film shaped

1997-12-09

1999-06-22

Oen, William

Measuring and testing

Instrument proving or calibrating

Dynamometer

G01L 2500

Patent

active

059152672

ABSTRACT:
Method for measuring piezoelectric constant of thin film shaped piezoelectric material is disclosed. After forming a thin film shaped piezoelectric material having a bottom electrode and a top electrode, a microscope is placed above the top electrode and a height of a displacement of the thin film is measured. A pneumatic pressure is generated from pressing member and is applied to the thin film. A charge generated from the thin film is measured by a charge measuring member. The piezoelectric constant of the thin film shaped piezoelectric material is calculated by using the measured charge and the magnitude of the applied pneumatic pressure. The piezoelectric constant can be measured by using a pneumatic loading method and by applying a uniform pneumatic pressure to the whole surface of the piezoelectric material regardless of a topology of the piezoelectric material, without causing a short or a plastic deformation.

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