Method for measuring nm-scale tip-sample capacitance

Details Method for measuring nm-scale tip-sample capacitance Method for measuring nm-scale tip-sample capacitance

2006-04-04

2006-04-04

Nguyen, Vincent Q. (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S684000, C324S690000

Reexamination Certificate

active

07023220

ABSTRACT:
A method for measuring nm-scale tip-sample capacitance including (a) measuring a cantilever deflection and a change in probe-sample capacitance relative to a reference level as a function of a probe assembly height; (b) fitting out-of-contact data to a function; (c) subtracting the function from capacitance data to get a residual capacitance as a function of the probe assembly height; and (d) determining the residual capacitance at a z-position where the cantilever deflection is zero.

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