Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Piezoelectric crystal testing
Patent
1996-07-25
1998-06-09
Brown, Glenn W.
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Piezoelectric crystal testing
324652, 324 711, 73778, G01N 332, G01N 2702, G01R 2922
Patent
active
057640688
ABSTRACT:
A method using quartz resonators probes dynamically the mechanical characteristics of thin films. This method probes the film properties at the anti-resonance frequency where the vibrational amplitude is smallest, minimizing nonlinear contributions in the dependence of the film mechanical characteristics on the resonator electrical characteristics. Determination of the mechanical characteristics involves impedance analysis, transformation of .vertline.Y.vertline. and .theta. data into a linear form so that the conductance and susceptance at the frequency of minimum absolute admittance can be accurately determined, and use of a two-dimensional Newton-Raphson numerical method to determine the values of the storage modulus G', loss modulus G", as well as various other film and resonator properties.
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Katz Alexander
Ward Michael D.
Brown Glenn W.
California Insitute of Technology
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