Method for measuring interface traps in thin gate oxide MOSFETS

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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C702S117000, C438S017000

Reexamination Certificate

active

07859289

ABSTRACT:
A method for measuring interface traps in a MOSFET, includes measuring charge pumping current of a pulse wave form for various frequencies over a predetermined frequency range, creating plotted points of the measured charge pumping current versus the predetermined frequency range, determining the total number of interface traps participating in the charge pumping current by calculating the slope of a best fit line through the plotted points.

REFERENCES:
patent: 5521525 (1996-05-01), Nicollian et al.

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