Method for measuring flare amount, mask for measuring flare...

Photocopying – Projection printing and copying cameras – Distortion introducing or rectifying

Reexamination Certificate

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C355S077000

Reexamination Certificate

active

07982851

ABSTRACT:
An amount is flare is measured by a method including steps of applying a photosensitive material to a substrate; exposing a part of the photosensitive material using a mask including a transmitting section which has no pattern so that the part of the photosensitive material varies in thickness; and measuring an amount of flare based on a distribution of film amounts of the photosensitive material remaining in a first region corresponding to the transmitting section and on a second region other than the first region after the step of exposing.

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J.P. Kirk, “Scattered Light in Photolithographic Lense” Proc. SPIE, 1994, vol. 2197, pp. 566-572.
Japanese Office Action dated Nov. 16, 2010, issued in corresponding Japanese Patent Application No. 2005-376024.

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