Method for measuring dimensions and optical system using the...

Details Method for measuring dimensions and optical system using the... Method for measuring dimensions and optical system using the...

2006-08-19

2009-11-17

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Dimension

C356S614000, C356S630000

Reexamination Certificate

active

07619753

ABSTRACT:
A method of measuring dimensions for an optical system to measure the critical dimension of a sample object according to this aspect of the present invention includes the steps of preparing a plurality of standard objects, selecting a predetermined focus metric algorithm, performing an analyzing process on each standard object to generate a plurality of focus metric distributions using the predetermined focus metric algorithm, analyzing the focus metric distributions to determine a target order, generating a reference relation, acquiring a measured characteristic value from the sample object, and determining the critical dimension of the sample object based on the measured characteristic value and the reference relation. Each standard object has a grating-shaped standard pattern with a predetermined pitch and line width. The focus metric algorithm is a gradient energy method, a Laplacian method, a standard deviation method, or a contrast method.

REFERENCES:
patent: 5251011 (1993-10-01), Fujiwara et al.
patent: 5361137 (1994-11-01), Aton et al.
patent: 6137578 (2000-10-01), Ausschnitt
patent: 6906782 (2005-06-01), Nishi

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