Method for measuring current at a p-n junction

Details Method for measuring current at a p-n junction Method for measuring current at a p-n junction

1983-12-30

1986-05-13

Levy, Stewart J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158R, G01R 3126, G01R 1908

Patent

active

045889465

ABSTRACT:
A method of mapping the current distribution of a p-n junction is described. The method uses measurements of the electron beam induced current.

REFERENCES:
Balk, L., et al., "Microcharacterization of Electroluminescent Diodes with the Scanning Electron Microscope (SEM)", Proc. of the S.I.D. vol. 16/2, 2nd qtr. 1975, pp. 119-124.
Parsons, R., et al., "Differentiated Electron-Beam-Induced-Current (DEBIC) Quantitative Characterization of Semiconductor Heterostructure Lasers", J. Appl. Phys. vol. 50, No. 1, Jan. 1979, pp. 538-540.
Leamy, H., "Charge Collection Scanning Electron Microscopy", J. Appl. Phys. vol. 53, No. 6, Jun. 1982, pp. R51-R80.

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