Method for measuring contour variations

Details Method for measuring contour variations Method for measuring contour variations

2003-09-12

2008-12-30

Toatley, Jr., Gregory J (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07471398

ABSTRACT:
A method for measuring a contour variation of a measuring area on an object. The method includes the steps of: irradiating the measuring area with a light beam, wherein reflection or transmission of the beam occurs; splitting the transmitted or reflected beam; combining the split beams with each other and observing a fringe pattern representing a differential phase between the split beams; varying the phase of the split beams relative to each other, such that the differential phase is kept within the range of 2 pi; calculating an optical path length difference from the differential phase; and relating the optical path length difference to the contour variation of the object.

REFERENCES:
patent: 5192982 (1993-03-01), Lapucci
patent: 5426503 (1995-06-01), Kusunose
patent: 6753972 (2004-06-01), Hirose et al.
patent: 7121922 (2006-10-01), van Brug
patent: 2003/0155537 (2003-08-01), Machavariani et al.
patent: 2004/0080757 (2004-04-01), Stanke et al.
Hedser Van Brug: “Temporal phase unwrapping and its application in shearography systems” Applied Optics, vol. 37, No. 28, Oct. 1, 1998, pp. 6701-6706, XP002244333 cited in the applications p. 6705; figures 6,7.
Patent Abstracts of Japan, vol. 017, No. 132 (P-1504), Mar. 18, 1993 - & JP 04 310847 A (Olympus Optical Co LTD), Nov. 2, 1992 abstract; figure 2.

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