Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1992-07-21
1995-10-24
Chilcot, Jr., Richard E.
Measuring and testing
Surface and cutting edge testing
Roughness
250306, 250307, 437 8, G01N 2700, H01J 3726
Patent
active
054600340
ABSTRACT:
A scanning electron microscope is used to scan the etched facet edge to produce digital data representative of its profile. A Fourier transform of the edge profile is produced and the resulting plurality of spatial frequency components can be used to generate a first low frequency waveform component indicative of lack of precise edge definition, a midrange frequency component indicative of poor liftoff samples, and a high frequency component indicative of metal grain size. A tilt adjustment feature of the electron microscope is optionally used to advantageously magnify the shape of the profile in the y direction.
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Chilcot Jr. Richard E.
Dombroske George
Nathans Robert L.
The United States of America as represented by the Secretary of
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