Method for measuring and analyzing interference fringes using a

Details Method for measuring and analyzing interference fringes using a Method for measuring and analyzing interference fringes using a

1993-07-19

1995-06-13

Turner, Samuel A.

Optics: measuring and testing

By particle light scattering

With photocell detection

356359, 359 15, G01B 9021

Patent

active

054248280

ABSTRACT:
A method for measuring and analyzing interference fringes using a hologram interferometer. The hologram interferometer is provided with a holographic optical element which includes a first pattern for diffracting a laser beam as a reference beam in a direction which is different from the surface of an object to be measured and a second pattern for diffracting a laser beam as a measuring beam which is to be radiated onto the surface to be measured, and measures interference fringes resulting from interference between the reference beam and the beam reflected from the measured surface of the object. Interference fringes are measured while the phase of the interference fringes is successively changed by moving the holographic optical element parallel to a surface thereof by given amounts in a direction normal to the gratings of the first pattern, and the configuration of the measured surface is obtained by analyzing the fringes.

REFERENCES:
patent: 5039223 (1991-08-01), Gemma et al.

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