Method for measuring a configuration of an object

Details Method for measuring a configuration of an object Method for measuring a configuration of an object

2007-01-09

2007-01-09

Williams, Hezron (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

C073S104000

Reexamination Certificate

active

10655292

ABSTRACT:
A touch sensor10having a stylus12with a tip12A making contact with a test piece W has an operational control structure including an oscillator3which oscillates the stylus12in the axial direction; a detecting circuit4which detects changes of oscillation of the stylus12; an adjustor unit5which removes noise added to an output signal from the detecting circuit4; a fine motion mechanism controller6which controls the operation of a fine motion mechanism21in such a manner that the change of the quantity of state of the detection signal is maintained constant; and a PZT driver7which operates the fine motion mechanism21. The measuring force during surface configuration measurement can be adjusted by adjusting an alternating signal to be applied to the touch sensor or by reducing the noise added to the detection signal without making modifications to a shape or structure of the touch sensor.

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patent: 2001099639 (2001-04-01), None

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