Method for mapping surfaces with respect to ellipsometric parame

Optics: measuring and testing – Refraction testing – Prism engaging specimen

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G01N 2140

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active

040308367

ABSTRACT:
Ellipsometric parameters for a given structural member surface area are obtained by scanning the structural member surface area at an oblique angle with a polarized monochromatic light beam and receiving the reflected light beam with a rotating analyzer. The rotating analyzer outputs are detected at its 0.degree., 45.degree. and 90.degree. azimuth orientations by a photodetector. The photodetector outputs can be plotted in their proper relationship to the scanned surface area boundaries to provide maps useful in nondestructive testing and other applications. Equations are provided that permit the conversion of the photodetector outputs into ellipsometric physical parameter values for refractive index, absorption coefficient and material thickness. Scanning in one embodiment is accomplished by a structural member holding device that can be simultaneously rotated and vertically translated.

REFERENCES:
patent: 2731878 (1956-01-01), Sherwin
Dignam, et al., "Azimuthal Misalignment & Surface Anisotropy As Sources of Error in Ellipsometry," Applied Optics, 8-1970, pp. 1868-1873.
McCartney, et al., "Determination of Proportions of Coal Components by Automated Microscopic Reflectance Scanning," Fuel vol. 50, 8-1971, pp. 226-235.

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