Metal deforming – With cutting – Machining after final metal-deforming
Patent
1998-06-26
1999-12-07
Crane, Daniel C.
Metal deforming
With cutting
Machining after final metal-deforming
72335, 723421, 72358, B21D 2832, B21D 5118
Patent
active
059963905
ABSTRACT:
In accordance with the present invention, the method of manufacturing a vacuum chamber which is used as a cluster tool, a vacuum film-forming apparatus, or the like of a manufacturing apparatus used for semiconductors, liquid crystals, solar cells, and the like, and which is formed by a vessel in which an opening (4A) is provided at one surface for forming a cover, and a hole (4) smaller than the opening (4A) is provided in an opposite surface to the opening (4A), includes the steps of:
REFERENCES:
patent: 1598240 (1926-08-01), Carlson
patent: 1699688 (1929-01-01), Cross
patent: 1886210 (1932-11-01), Mitchell
patent: 2063386 (1936-12-01), Langford
patent: 3066408 (1962-12-01), Fader
patent: 4662047 (1987-05-01), Berchem
patent: 4709569 (1987-12-01), Sabroff
Iwamoto Takashi
Iwasawa Hideo
Ogata Yosiki
Ono Shin-ichi
Shinobudani Koji
Crane Daniel C.
The Japan Steel Works Ltd.
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