Method for manufacturing thin-film magnetic recording medium

Details Method for manufacturing thin-film magnetic recording medium Method for manufacturing thin-film magnetic recording medium

2006-12-26

2006-12-26

Hassanzadeh, Parviz (Department: 1763)

Etching a substrate: processes

Forming or treating article containing magnetically...

Reexamination Certificate

active

07153441

ABSTRACT:
A thin-film magnetic recording medium is produced by forming a laminate for magnetic data recording on a nonmagnetic substrate through a dry process, forming a protection layer on the laminate also through a dry process, plasma-etching the protection layer, and forming a lubricant layer on the plasma-etched protection layer. All steps are completed continuously in a vacuum without abrasion. The surface of the resulting recording medium is substantially smoother than the prior art.

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