Method for manufacturing thin-film magnetic head sliders

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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Details

C029S603070, C156S232000, C156S235000, C264S236000, C264S310000, C427S240000, C427S372200, C451S005000, C451S041000

Reexamination Certificate

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10917591

ABSTRACT:
A method for manufacturing thin-film magnetic head sliders is disclosed. Initially, an elastic layer, which may be made of poly-dimethyl siloxane (PDMS), is spun on a wafer and is thermally cured. Then, a resist layer is spun on the elastic layer. Both the resist layer and the elastic layer are subsequently peeled off together from the wafer. Next, the peeled resist layer/elastic layer is applied onto a group of magnetic heads with the resist layer in direct contact with the magnetic heads. Finally, the elastic layer is peeled off from the resist layer such that the resist layer remains attaching to the magnetic heads.

REFERENCES:
patent: 5294257 (1994-03-01), Kelly et al.
patent: 6511156 (2003-01-01), Kazama et al.
patent: 6656313 (2003-12-01), Egitto et al.
patent: 6725526 (2004-04-01), Lille

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