Method for manufacturing thin film magnetic head

Details Method for manufacturing thin film magnetic head Method for manufacturing thin film magnetic head

1982-08-04

1983-09-06

Tufariello, T. M

Chemistry: electrical and wave energy

Processes and products

204 38R, 204 38B, C25D 502

Patent

active

044028016

ABSTRACT:
The invention provides a method for manufacturing a thin film magnetic head with a low step structure having a first nonmagnetic insulating layer, a lower magnetic layer, a nonmagnetic insulating layer of a thickness corresponding to a gap length, a second nonmagnetic insulating layer, a conductive layer which constitutes a coil, a third nonmagnetic insulating layer, and an upper magnetic layer, each of which is sequentially formed on a nonmagnetic conductive substrate in the order named. A conductive layer is formed in a recess whose bottom surface corresponds to an exposed upper surface of the nonmagnetic conductive substrate and which is formed in a predetermined portion of the first nonmagnetic insulating layer formed on the nonmagnetic conductive substrate. Thereafter, electroplating is performed to form a yoke portion of the lower magnetic layer in the recess by applying a voltage to the conductive layer as an electrode through the nonmagnetic conductive substrate. Further, a magnetic layer of a predetermined thickness is formed on the yoke portion and in its vicinity to increase the thickness of the yoke.

REFERENCES:
patent: 3317408 (1967-05-01), Barnes
patent: 3520782 (1970-07-01), Carbonel
patent: 3764486 (1973-10-01), Tinklenberg

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