Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Metallic housing or support
Reexamination Certificate
2006-11-03
2009-08-04
Toledo, Fernando L (Department: 2895)
Semiconductor device manufacturing: process
Packaging or treatment of packaged semiconductor
Metallic housing or support
C257S077000, C257SE23011, C977S712000
Reexamination Certificate
active
07569425
ABSTRACT:
A method for manufacturing a thermal interface material includes the steps of: (a) forming an array of carbon nanotubes on a substrate; (b) submerging the carbon nanotubes in a liquid macromolecular material; (c) solidifying the liquid macromolecular material; and (d) cutting the solidified liquid macromolecular material, to obtain the thermal interface material with the carbon nanotubes secured therein.
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Sa Vas Berber, Young-Kyun Kwon, and David Tomanek; Unusually High Thermal Conductivity of Carbon Nanotubes; p. 4613, vol. 84, Physical Review Letters 2000.
Shoushan Fan, Michael G. Chapline, Nathan R. Franklin, Thomas W. Tombler, Alan M. Cassell, and Hongjie Dai; Self-Oriented Regular Arrays of Carbon Nanotubes and Their Field Emission Properties; pp. 512-514, vol. 283, Science 1999.
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Fan Shou-Shan
Huang Hua
Liu Chang-Hong
Bonderer D. Austin
Hon Hai Precision Industry Co. Ltd.
Toledo Fernando L
Tsinghua University
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