Method for manufacturing terminal contacts for thin-film magneti

Details Method for manufacturing terminal contacts for thin-film magneti Method for manufacturing terminal contacts for thin-film magneti

1988-07-19

1989-05-16

Hall, Carl E.

Metal working

Method of mechanical manufacture

Electrical device making

360123, G11B 542

Patent

active

048296589

ABSTRACT:
Method for manufacturing terminal contacts for thin-film magnetic heads. A photolithographic process sequence is desirable when manufacturing coherent terminal contacts for thin-film magnetic heads that allows the technological complexity to be kept as low as possible taking metrological and mechanical points of view into consideration. To that end, an electrically conductive permalloy layer, buried under a protective aluminum oxide layer, is structured with a metallic mask such that interconnects that temporarily short the magnetic heads having two write/read heads on a substrate element during the photolithographic process execution are brought together at a location which is later parted along a parting line. As a result of the short, the application of an additional, metallic carrier layer as a galvanic underlayment for a gold film is avoided.

REFERENCES:
patent: 4613404 (1986-09-01), Tabei
patent: 4652954 (1987-03-01), Church
patent: 4759118 (1988-07-01), Nakashima

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