Method for manufacturing terminal contacts for thin-film magneti

Metal working – Method of mechanical manufacture – Electrical device making

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1566591, 360103, 360123, G11B 542

Patent

active

048561819

ABSTRACT:
Method for manufacturing terminal contacts for thin-film magnetic heads. The method of manufacturing reinforced terminal contacts for thin-film magnetic heads provides a photolithographic process sequence that allows the technical requirements to be kept as low as possible and that reduces the gold consumption to a minimum. To that end, a copper layer for contact reinforcement fashioned as a tower is electrodeposited in contact windows formed by a photoresistive layer, which is electrodeposited onto an electrically conductive permalloy layer of a substrate before this is completely structured and has been provided with a protective aluminum oxide layer. A gold film required for the attachment of a bonding wire is finally deposited either directly preceding the protection or following the application of the aluminum oxide on the copper layer.

REFERENCES:
patent: 4219853 (1980-08-01), Albert et al.
patent: 4613404 (1986-09-01), Tabei
patent: 4614563 (1986-09-01), Kubo
patent: 4624048 (1986-11-01), Hinkel et al.

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