Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2007-05-08
2007-05-08
Kim, Paul D (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S025350, C029S592100, C029S609100, C204S192320, C204S192330, C204S192350, C216S062000, C216S066000, C310S31300R, C310S31300R, C310S31300R, C310S364000, C333S193000, C333S195000
Reexamination Certificate
active
10792543
ABSTRACT:
A piezoelectric substrate is provided with interdigital transducer electrodes including a first electrode layer, a second electrode layer, and a third electrode layer that is principally made of aluminum. The piezoelectric substrate has a stepped structure on the surface of the piezoelectric substrate, the stepped structure including terraces each having a width of about 50 nm or less and steps each having a width of a mono-molecular layer (e.g., about 14 Å).
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Osamu Nakagawara et al.; “Epitaxially Grown Aluminum Films With Titanium Intermediate Layer on ∅Rotated Y-X LiNbO3Piezoelectric Single Crystal Substrates”; Journal of Crystal Growth; No. 249; Mar. 2003; pp. 497-501.
Nakagawara Osamu
Shinoda Akinori
Keating & Bennett LLP
Kim Paul D
Murata Manufacturing Co. Ltd.
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