Method for manufacturing substrate for discrete track...

Details Method for manufacturing substrate for discrete track... Method for manufacturing substrate for discrete track...

2008-01-01

2008-01-01

Chen, Kin-Chan (Department: 1765)

Semiconductor device manufacturing: process

Chemical etching

Vapor phase etching

C438S745000

Reexamination Certificate

active

07314833

ABSTRACT:
According to one embodiment, a method for manufacturing a substrate for a discrete track recording media, the method includes forming an imprint resist layer on a substrate, imprinting, on the imprint resist layer, a stamper formed with patterns of protrusions and recesses corresponding to recording track zones and servo zones to transfer the patterns of protrusions and recesses to the imprint resist layer, removing the stamper from the imprint resist layer, and diffusing liquefied CO2in a process chamber set at a pressure of 2 to 5 atm, diffusing liquefied H2O in the process chamber set at a pressure of 0.01 to 1 atm, or diffusing a reactive gas selected from a group consisting of liquefied CF4, CHF3, SF6, and C2F6in the process chamber set at an arbitrary pressure, to jet spray the liquefied gas onto a surface of the substrate.

REFERENCES:
patent: 5747385 (1998-05-01), Torii
patent: 5853962 (1998-12-01), Bowers
patent: 5908510 (1999-06-01), McCullough et al.
patent: 6343609 (2002-02-01), Kim
patent: 6936181 (2005-08-01), Bulthaup et al.
patent: 2003/0082485 (2003-05-01), Bulthaup et al.
patent: 2004/0209123 (2004-10-01), Bajorek et al.
patent: 2005/0271819 (2005-12-01), Wago et al.
patent: 3254762 (2002-02-01), None
patent: 2004-079992 (2004-03-01), None
patent: 2004-349577 (2004-12-01), None
patent: 2004-356244 (2004-12-01), None

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