Fishing – trapping – and vermin destroying
Patent
1991-09-30
1993-01-05
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437149, 437911, H01L 21266
Patent
active
051770296
ABSTRACT:
A method for manufacturing a static induction type semiconductor device is to form gate zones on a surface side of a semiconductor substrate, to cover the surface including the gate zones with an oxide film, to form through the oxide film apertures for providing cathode zones in the substrate, the apertures respectively overlapping partly each gate zone, and to form the cathode zones with thermal diffusion of an impurity carried out through the apertures, the cathode zones thus partly overlapping the gate zones. Concentration of the impurity as well as the depth of the diffusion at thus made impurity diffusion zones can be thereby stabilized, and eventually electric characteristics of enhancement type, static induction type semiconductor device can be sufficiently made stable.
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Kataoka Kazushi
Komoda Takuya
Suzumura Masahiko
Chaudhari C.
Hearn Brian E.
Matsushita Electric & Works Ltd.
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