Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2005-01-25
2005-01-25
Diamond, Alan (Department: 1753)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C136S244000, C136S256000, C136S252000, C257S443000, C257S431000, C257S621000, C438S073000, C438S114000, C438S461000, C438S462000, C438S463000
Reexamination Certificate
active
06846696
ABSTRACT:
The invention is aimed to prevent that fall of characteristic of a solar battery and producing yield caused by particles of powder condition generating from working part at laser beam process in the method producing the solar battery by laser beam process. The constitution of the invention is characterized by comprising: a first step forming the lower electrode and the semiconductor layer on the insulating substrate by laminating; a second step forming a protective film on surface of the semiconductor; a third step forming an opening portion at the semiconductor layer, or the semiconductor layer and the lower electrode by laser beam process after the second step; and a fourth step removing the protective film.
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Adachi Hiroki
Isobe Yukihiro
Nishi Kazuo
Shinohara Hisato
Yonezawa Masato
Costellia Jeffrey L.
Diamond Alan
Nixon & Peabody LLP
Semiconductor Energy Laboratory Co,. Ltd.
TDK Corporation
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