Method for manufacturing silicone wafers

Details Method for manufacturing silicone wafers Method for manufacturing silicone wafers

2011-03-22

2011-03-22

Morgan, Eileen P. (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S051000, C451S054000, C451S057000

Reexamination Certificate

active

07909678

ABSTRACT:
A method of manufacturing silicon wafers that include a front surface and a block surface and lateral edges, includes forming a silicon wafer by separating a rectangular, in particular, silicon block with lateral surfaces and before separation, grounding and/or polishing the lateral surfaces of the silicon block parallel to the edge of the silicon wafer.

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