Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal
Patent
1981-12-09
1983-07-05
Ozaki, G.
Metal treatment
Process of modifying or maintaining internal physical...
Chemical-heat removing or burning of metal
148187, H01L 21225
Patent
active
043916589
ABSTRACT:
A method for manufacturing a semiconductor substrate comprising the steps of forming on all surfaces of a raw semiconductor substrate an impurity layer of the same conductivity type as the raw semiconductor substrate and forming a first insulating film on the entire impurity layer, removing those portions of the impurity layer and first insulating film which are formed on one major surface of the raw semiconductor substrate and finishing the exposed major surface of the raw semiconductor substrate, thus providing a mirror surface, forming a second insulating film on the mirror surface of the raw semiconductor substrate and on the remaining first insulating film, forming a protective film on the entire second insulating film and forming a third insulating film on the entire protective film, thus providing a laminate, holding the laminate side by side together with other laminates provided in the same way, heating the laminates thus held, in an oxidizing atmosphere, thereby diffusing the impurity from the impurity layers into the raw semiconductor substrates to form diffusion layers in the raw semiconductor substrates, and removing the first insulating film, second insulating film, protective film and third insulating film from each of the laminates. According to the invention, a high precision and high quality product semiconductor substrate can be inexpensively provided.
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Honjo Shigeru
Kitane Syoiti
Ohe Kuniyoshi
Tobioka Fumio
Ozaki G.
Tokyo Shibaura Denki Kabushiki Kaisha
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