Method for manufacturing semiconductor optical integrated device

Details Method for manufacturing semiconductor optical integrated device Method for manufacturing semiconductor optical integrated device

1987-02-18

1989-04-11

Hearn, Brian E.

Fishing, trapping, and vermin destroying

357 17, 437126, 372 45, 372 46, 372 50, 372 96, 350 9611, H01L 2120, H01L 21203, H01L 21205

Patent

active

048206555

ABSTRACT:
A method for manufacturing a semiconductor optical integrated device in which a semiconductor element A having an optical waveguide region and a semiconductor element B having another optical waveguide region are integrated on a single substrate. In accordance with the present invention, there is provided steps of growing the optical waveguide region of the semiconductor element A and a protective layer therefor are grown on the entire area of the substrate surface, selectively removing them from the substrate surface in the region to be ultimately occupied by the semiconductor element B, and forming in the region the optical waveguide region of the semiconductor element B through crystal growth.

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