Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal
Reexamination Certificate
2011-03-01
2011-03-01
Huynh, Andy (Department: 2829)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
C257S076000, C257S082000, C257SE21001, C257SE33034, C257SE33063
Reexamination Certificate
active
07897418
ABSTRACT:
A method for manufacturing a semiconductor light emitting device includes forming an insulating film on a semiconductor substrate, the insulating film having an opening therein, forming a Pd electrode in the opening and on the insulating film, and removing the portion of the Pd electrode on the insulating film by the application of a physical force to the portion, while leaving the Pd electrode in the opening.
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Abe Shinji
Kawasaki Kazushige
Kusunoki Masatsugu
Oka Takafumi
Sakuma Hitoshi
Brown Valerie
Huynh Andy
Leydig , Voit & Mayer, Ltd.
Mitsubishi Electric Corporation
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