Method for manufacturing semiconductor laser optical device

Details Method for manufacturing semiconductor laser optical device Method for manufacturing semiconductor laser optical device

2005-12-20

2005-12-20

Nguyen, Tuan H. (Department: 2813)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

C438S031000, C438S046000

Reexamination Certificate

active

06977186

ABSTRACT:
A method for manufacturing a semiconductor includes: a first step of forming an etching stop layer on a first semiconductor layer; and a second step of forming a second semiconductor layer made of a group III–V compound semiconductor on the etching stop layer. An etching rate for the etching stop layer by dry etching is less than an etching rate for the second semiconductor layer.

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