Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-05-09
2006-05-09
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C438S014000, C438S018000, C438S225000
Reexamination Certificate
active
07043328
ABSTRACT:
A manufacturing method for a semiconductor device which is capable of manufacturing the semiconductor device with a high quality in high yields while reducing variations in electric characteristic is disclosed. The manufacturing method according to the present invention includes a main body wafer manufacturing process for manufacturing a wafer on which a semiconductor device to be completed as a product is formed and a monitor wafer manufacturing process for manufacturing a wafer on which a monitor element is formed, the processes sharing a monitoring step alone, the main body wafer manufacturing process including a variation reduction step, the monitor wafer manufacturing process including a quality check step and a condition setting step.
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Ishii Kazutoshi
Kitajima Yuichiro
Minami Yukimasa
Osanai Jun
Uemura Keisuke
Adams & Wilks
Kosowski Alexander
Picard Leo
Seiko Instruments Inc.
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